Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 13, 2018
Patent Application Number
15674860
Date Filed
August 11, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
Provided herein is a semiconductor device including N stacked groups (where N is a natural number greater than or equal to two) sequentially stacked over a substrate, each stacked group including interlayer insulating films and conductive patterns alternately stacked, and N concave portions each having stepped sidewalls formed in the interlayer insulating films and the conductive patterns of the stacked groups, the N concave portions each having stepped sidewalls being aligned in a first direction.
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