Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 20, 2018
Patent Application Number
15285925
Date Filed
October 5, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for reference image contour generation includes generating a mask pattern based on design target information, generating a reference image based on a simulation of photolithographic effects on the mask pattern, generating a reference image contour pattern based on edge detection in the reference image, and generating a scanned image contour pattern as a function of the reference image contour pattern and a scanned image of an integrated circuit.
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