Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yi-Ming Lin0
C. H. Chen0
Chao-Ching Chang0
Cheng-Yi Wu0
Chin-Szu Lee0
Chun-Chih Lin0
Jian-Shin Tsai0
Min-Hui Lin0
...
Date of Patent
November 20, 2018
0Patent Application Number
155975210
Date Filed
May 17, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of fabricating an image sensor includes depositing a first dielectric layer over a substrate, removing a portion of the first dielectric layer from the substrate to form a trench, depositing a conductive layer over the first dielectric layer and in the trench, forming a protective layer lining a top surface of the conductive layer and sidewalls and a bottom surface of the groove in the conductive layer, and removing a portion of the conductive layer to form a grid structure. A groove corresponding to the trench is formed in the conductive layer.
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