US Patent 10139308 Physical quantity detection apparatus, measurement system, and measurement apparatus

A detecting element unit of a physical quantity detection apparatus includes a detection part and a supporting part. The detection part has a base part, a movable part coupled to the base part via a joint part, and a vibrator provided over the base part and the movable part, and the supporting part includes a fixing portion to be fixed to a base for supporting the base part. A processing unit of the physical quantity detection apparatus extracts vibration response signals at a resonance frequency of the detecting element unit from output of the vibrator.