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US Patent 10141160 Apparatus of plural charged-particle beams

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
November 30, 2016
Date of Patent
November 27, 2018
Patent Application Number
15365145
Patent Citations Received
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US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
0
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
0
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US Patent 11508591 High resolution electron beam apparatus with dual-aperture schemes
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US Patent 11521827 Method of imaging a 2D sample with a multi-beam particle microscope
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US Patent 11239053 Charged particle beam system and method
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US Patent 11239054 Multi-beam particle beam system
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US Patent 11562881 Charged particle beam system
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US Patent 11562880 Particle beam system for adjusting the current of individual particle beams
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US Patent 10811222 Apparatus of plural charged-particle beams
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US Patent 10892138 Multi-beam inspection apparatus with improved detection performance of signal electrons
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10141160
Patent Primary Examiner
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David A. Vanore

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