US Patent 10141214 Dual scara arm
Patent 10141214 was granted and assigned to Brooks Automation on November, 2018 by the United States Patent and Trademark Office.
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Patent abstract
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
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Patent Number
101412140
Date of Patent
November 27, 2018
0Patent Application Number
148686890
Date Filed
September 29, 2015
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Patent Primary Examiner
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Patent Applicant
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Patent Jurisdiction
Patent Number
101412140
Date of Patent
November 27, 2018
0Patent Application Number
148686890
Date Filed
September 29, 2015
0Patent Citations Received
Patent Primary Examiner
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US Patent 10141214 Dual scara arm
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10141214
Date of patent
November 27, 2018
Patent application number
14868689
Date Filed
September 29, 2015
Patent primary examiner
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