US Patent 10145674 Measurement of semiconductor structures with capillary condensation
Patent 10145674 was granted and assigned to KLA-Tencor on December, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 25, 2017
Date of Patent
December 4, 2018
Patent Applicant
Patent Application Number
15497033
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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