US Patent 10153136 Hollow RF feed with coaxial DC power feed
Patent 10153136 was granted and assigned to Lam Research on December, 2018 by the United States Patent and Trademark Office.
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Patent abstract
A feed tube for a substrate processing system includes an outer tube and a feed rod. The feed rod is arranged within the outer tube. The feed rod is arranged to provide radio frequency power to the substrate processing system and the outer tube provides a return for the radio frequency power. At least one conductor is routed within the feed rod. The conductor is arranged to provide electrical power to at least one component of the substrate processing system separate from the radio frequency power provided by the feed rod.
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Patent Inventor Names
Alex Paterson0
Jason Augustino0
John Drewery0
Neil Benjamin0
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Patent Citations Received
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US Patent 10153136 Hollow RF feed with coaxial DC power feed
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Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10153136
Date of patent
December 11, 2018
Patent application number
14817372
Date Filed
August 4, 2015
Patent primary examiner
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