Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Huan-Lisng Tzeng0
Chia-Chi Chung0
Kuo-Yen Chang0
Date of Patent
December 18, 2018
0Patent Application Number
150882600
Date Filed
April 1, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In some embodiments, a maintenance apparatus is provided for maintaining semiconductor processing equipment. The maintenance apparatus has an articulated member having a first member with a handle engagement portion and a second member with a first tool engagement portion. The first member is rotationally coupled to the first member about an articulation axis. A first tool member in selective engagement with the first tool engagement portion of the second member.
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