Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Randy L. Wolf0
Brett T. Cucci0
Mark D. Jaffe0
Zhong-Xiang He0
Alvin J. Joseph0
Anthony K. Stamper0
Date of Patent
December 18, 2018
0Patent Application Number
151527970
Date Filed
May 12, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device may include a transistor gate in a device layer; an interconnect layer over the device layer; and an air gap extending through the interconnect layer to contact an upper surface of the transistor gate. The air gap provides a mechanism to reduce both on-resistance and off-capacitance for applications using SOI substrates such as radio frequency switches.
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