Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
George M. Molnar0
Michael W. Judy0
Xin Zhang0
Christopher Needham0
Kemiao Jia0
Date of Patent
January 1, 2019
Patent Application Number
14502475
Date Filed
September 30, 2014
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.
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