Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 1, 2019
Patent Application Number
15489019
Date Filed
April 17, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for forming an image sensor device on a substrate is disclosed. The method includes (a) recessing a portion of the substrate thereby forming a first shallow trench; (b) forming a spacer layer surrounding at least part of a sidewall of the first shallow trench; and (c) forming a first deep trench that extends below the first shallow trench by further recessing the substrate while using the spacer layer as a mask.
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