Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takashi Ando0
Mohit Bajaj0
Rajan K. Pandey0
Rajesh Sathiyanarayanan0
Terence B. Hook0
Date of Patent
January 1, 2019
0Patent Application Number
158136340
Date Filed
November 15, 2017
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
A work function setting metal stack includes a configuration of layers including a high dielectric constant layer and a diffusion prevention layer formed on the high dielectric constant layer. An aluminum doped TiC layer has a thickness greater than 5 nm wherein the configuration of layers is employed between two regions as a diffusion barrier to prevent mass diffusion between the two regions.
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