Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 8, 2019
Patent Application Number
15056664
Date Filed
February 29, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus includes a silicon (Si) substrate having a first surface and a second surface, the silicon substrate having a resistivity at room temperature greater than approximately 1000 Ω-cm, and less than approximately 15000 Ω-cm; and a piezoelectric layer disposed over the substrate and having a first surface and a second surface. The piezoelectric layer may have a thickness in the range of approximately 0.5 μm to approximately 30.0 μm, and is substantially without iron (Fe).
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