Patent attributes
The vacuum valve includes a closure member that can be moved, parallel to a longitudinal movement direction, between an open position in which it unblocks the valve opening and an intermediate position in which it covers the valve opening but is raised off the valve seat, and that can be moved, parallel to a transverse movement direction, between the intermediate position and a closed position in which it bears against the valve seat; a valve rod that bears the closure member is mounted for displacement parallel to the longitudinal and transverse movement directions; a displacement part rigidly connected to the valve rod; and a drive motor which rotates a driveshaft about an axis parallel to the longitudinal movement direction in order to move the closure member between the open position, the intermediate position and the closed position. The drive shaft has, in a first section, a longitudinal displacement cam member of a longitudinal displacement cam mechanism that interacts with a longitudinal displacement engagement member of the longitudinal displacement cam mechanism in order to move the closure member between the open position and the intermediate position, and has, in a second section, a transverse displacement cam member of a transverse displacement cam mechanism that interacts with a transverse displacement engagement member of the transverse displacement cam mechanism in order to move the closure member between the intermediate position and the closed position.
