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US Patent 10190230 Cross flow manifold for electroplating apparatus

Overview Structured Data Issues Contributors Activity

Is a

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Date Filed

March 2, 2017

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Date of Patent

January 29, 2019

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Patent Application Number

15448472

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Patent Citations

US Patent 10094034 Edge flow element for electroplating apparatus

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Patent Citations Received

US Patent 10662545 Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating

US Patent 11047059 Dynamic modulation of cross flow manifold during elecroplating

US Patent 11001934 Methods and apparatus for flow isolation and focusing during electroplating

US Patent 10364505 Dynamic modulation of cross flow manifold during elecroplating

US Patent 10781527 Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplating

Patent Inventor Names

Steven T. Mayer

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Bryan L. Buckalew

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Richard Abraham

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Robert Rash

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

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Patent Primary Examiner

Zulmariam Mendez

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