Patent 10192302 was granted and assigned to KLA-Tencor on January, 2019 by the United States Patent and Trademark Office.
Defect detection is performed by comparing a test image and a reference image with a rendered design image, which may be generated from a design file. This may occur because a comparison of the test image and another reference image was inconclusive due to noise. The results of the two comparisons with the rendered design image can indicate whether a defect is present in the test image.