US Patent 10195704 Lift pin for substrate processing
Patent 10195704 was granted and assigned to Infineon Technologies on February, 2019 by the United States Patent and Trademark Office.
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Patent abstract
Lift pins and devices having lift pins are provided. According to an aspect, a lift pin may have a tapered distal portion. According to another aspect, a lift pin may have two portions threadedly engaged with each other. According to yet another aspect, a lift pin may be mounted to a lifting plate with slackness.
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Patent Inventor Names
Christian Himmelsbach0
Helmut Brunner0
Joachim Hirschler0
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US Patent 10195704 Lift pin for substrate processing
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Patent applicant
Current assignee
Patent jurisdiction
Patent number
10195704
Date of patent
February 5, 2019
Patent application number
13833616
Date Filed
March 15, 2013
Patent primary examiner
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