US Patent 10197440 Niobium-germanium superconducting photon detector

The various embodiments described herein include methods, devices, and systems for fabricating and operating niobium-germanium-based superconducting devices. In one aspect, a device includes a superconducting nanowire composed of niobium-germanium, a protective layer configured to inhibit oxidation of the superconducting nanowire, and a current source configured to supply a current to the superconducting nanowire. In another aspect, a method of fabrication includes: (1) depositing a layer of niobium-germanium on a substrate; (2) removing one or more portions of the layer of niobium-germanium to define one or more nanowires; and (3) depositing a protective layer over the one or more nanowires, the protective layer adapted to inhibit oxidation of niobium-germanium in the one or more nanowires.