US Patent 10203247 Systems for providing illumination in optical metrology
Patent 10203247 was granted and assigned to KLA-Tencor on February, 2019 by the United States Patent and Trademark Office.
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Patent abstract
A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
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Patent Inventor Names
Alexander Svizher0
Amnon Manassen0
Anatoly A. Vasiliev0
Anatoly Shchemelinin0
Andrei V. Shchegrov0
Andrew V. Hill0
Avi Abramov0
Daniel Kandel0
Derrick A. Shaughnessy0
Gregory R. Brady0
Ilan Sela0
Ilya Bezel0
James Andrew Allen0
Lawrence D. Rotter0
Mark Ghinovker0
Maxim Khokhlov0
Moshe Markowitz0
Muzammil A. Arain0
Ohad Bachar0
Oleg Shulepov0
Oleg Tsibulevsky0
Yaron Ish-Shalom0
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
102032470
Date of Patent
February 12, 2019
0Patent Application Number
153695600
Date Filed
December 5, 2016
0Patent Citations Received
Patent Primary Examiner
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US Patent 10203247 Systems for providing illumination in optical metrology
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10203247
Date of patent
February 12, 2019
Patent application number
15369560
Date Filed
December 5, 2016
Patent primary examiner
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