US Patent 10211087 Semiconductor structure with airgap
Is a
Date Filed
November 14, 2017
0
Date of Patent
February 19, 2019
0
Patent Application Number
15812320
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Patent Inventor Names
Anthony K. Stamper
0
Alvin J. Joseph
0
Mark D. Jaffe
0
Qizhi Liu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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