Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alvin J. Joseph0
Anthony K. Stamper0
Mark D. Jaffe0
Randy L. Wolf0
Zhong-Xiang He0
Brett T. Cucci0
Date of Patent
February 19, 2019
Patent Application Number
15152794
Date Filed
May 12, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device may include a transistor gate in a device layer; an interconnect layer over the device layer; and an air gap extending through the interconnect layer to contact an upper surface of the transistor gate. The air gap provides a mechanism to reduce both on-resistance and off-capacitance for applications using SOI substrates such as radio frequency switches.
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