Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ramkishan Rao Lingampalli0
Tony Kaushal0
Jeremy Tucker0
Date of Patent
February 26, 2019
Patent Application Number
14594423
Date Filed
January 12, 2015
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A gas distribution plate for a substrate processing system includes a ceramic lower portion of the gas distribution plate including a plurality of ceramic green sheets. A ceramic upper portion of the gas distribution plate includes a plurality of ceramic green sheets. An electrode is printed on at least one of an upper surface of the ceramic lower portion and a lower surface of the ceramic upper portion using metal screen printing. A first plurality of through holes is machined through the ceramic lower portion and the ceramic upper portion of the gas distribution plate prior to sintering.
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