US Patent 10239101 Purge device and method of diffusing gas including purge gas

A purge device includes an internal space defined by a chassis, and performs a purge process where an inside of a storage container in the internal space with an article being accommodated is purged with a purge gas. The purge device includes an air blower that is located outside the chassis, and sends air to an area where a gas including the purge gas in the internal space leaks through an opening in the chassis so as to diffuse the gas including the purge gas leaking from the opening.