US Patent 10239707 Semiconductor wafer handling and transport
Patent 10239707 was granted and assigned to Brooks Automation on March, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 9, 2018
0
Date of Patent
March 26, 2019
0
Patent Applicant
Patent Application Number
15866215
0
Patent Inventor Names
Robert T. Caveney
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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