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US Patent 10239746 Vertical stopper for capping MEMS devices

Patent 10239746 was granted and assigned to Analog Devices on March, 2019 by the United States Patent and Trademark Office.

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Patent abstract

Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.

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