Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ajey Poovannummoottil Jacob0
Yusheng Bian0
Date of Patent
March 26, 2019
0Patent Application Number
159742520
Date Filed
May 8, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with multiple configurations and methods of manufacture. A structure includes: a grating coupler having a sawtooth configuration provided over a semiconductor slab; and a back end of line (BEOL) stack over the sawtooth configuration of the grating coupler.
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