Patent attributes
A chromatic confocal sensor includes: a light source portion that emits a plurality of light beams having different wavelengths; a plurality of optical heads that converge the plurality of light beams emitted from the light source portion at different focal positions and emit measurement light reflected by a measurement point at the focal positions; a spectrometer including a line sensor, and an optical system that includes a diffraction grating that diffracts a plurality of measurement light beams emitted from the plurality of optical heads, and emits the plurality of measurement light beams diffracted by the diffraction grating to a plurality of different light-receiving areas of the line sensor; and a position calculation portion that calculates a position of a plurality of measurement points as a measurement target of the plurality of optical heads based on a light-receiving position of the plurality of light-receiving areas of the line sensor.
