US Patent 10250163 Inverse electrowetting energy harvesting and scavenging methods, circuits and systems

An inverse electrowetting harvesting and scavenging circuit includes a first substrate having first and second surfaces. An electrode is formed proximate the first surface and includes an insulating layer covering a surface of the electrode. An electromechanical systems device includes a moveable mass extending over the first surface of the first substrate that may be displaced relative to the first substrate in three dimensions responsive to external forces applied to the moveable mass. The movable mass includes a moveable electrode and a conductive fluid is positioned between the insulating layer of the electrode and the movable electrode. Energy harvesting and scavenging circuitry is electrically coupled to the moveable electrode and the other electrode and is configured to provide electrical energy responsive to electrical energy generated by the moveable electrode, conductive fluid and the electrode through the reverse electrowetting phenomena due to movement of the moveable electrode relative to the electrode and to the conductive fluid on top of the electrode.