Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuanwei Zheng0
Dyson H. Tai0
Gang Chen0
Yi Ma0
Duli Mao0
Date of Patent
April 23, 2019
0Patent Application Number
157170470
Date Filed
September 27, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An image sensor includes a plurality of photodiodes disposed in a semiconductor material, and a through-semiconductor-via coupled to a negative voltage source. Deep trench isolation structures are disposed between individual photodiodes in the plurality of photodiodes to electrically and optically isolate the individual photodiodes. The deep trench isolation structures include a conductive material coupled to the through-semiconductor-via, and a dielectric material disposed on sidewalls of the deep trench isolation structures between the semiconductor material and the conductive material.
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