US Patent 10276364 Bevel etch profile control
Patent 10276364 was granted and assigned to Applied Materials on April, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 19, 2017
0
Date of Patent
April 30, 2019
0
Patent Applicant
Patent Application Number
15654444
0
Patent Inventor Names
Jeongmin Lee
0
Zonghui Su
0
Abdul Aziz Khaja
0
Vinay Prabhakar
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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