US Patent 10281263 Critical dimension measurements with gaseous adsorption
Patent 10281263 was granted and assigned to KLA-Tencor on May, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 7, 2016
0
Date of Patent
May 7, 2019
0
Patent Applicant
Patent Application Number
15204938
0
Patent Citations Received
Patent Inventor Names
Shankar Krishnan
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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