Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hariklia Deligianni0
Bruce B. Doris0
Eugene J. O'Sullivan0
Naigang Wang0
Date of Patent
May 7, 2019
0Patent Application Number
152814660
Date Filed
September 30, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for fabricating a magnetic material stack on a substrate includes the following steps. A first dielectric layer is formed. A first magnetic material layer is formed on the first dielectric layer. At least a second dielectric layer is formed on the first magnetic material layer. At least a second magnetic material layer is formed on the second dielectric layer. During one or more of the forming steps, a surface smoothing operation is performed to remove at least a portion of surface roughness on the layer being formed. The magnetic material stack can be used to form a low magnetic loss yoke inductor.
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