US Patent 10288483 Recovering spectral shape from spatial output
Patent 10288483 was granted and assigned to Cymer on May, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 17, 2017
Date of Patent
May 14, 2019
Patent Applicant
Patent Application Number
15651935
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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