Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 28, 2019
Patent Application Number
15196640
Date Filed
June 29, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A magnetic laminating structure and process for preventing substrate bowing include multiple film stack segments that include a first magnetic layer, at least one additional magnetic layer, and a dielectric spacer disposed between the first and at least one additional magnetic layers. A dielectric isolation layer is intermediate magnetic layers and on the sidewalls thereof. The magnetic layers are characterized by defined tensile strength and the multiple segments function to relive the stress as the magnetic laminating structure is formed, wherein the cumulative thickness of the magnetic layers is greater than 1 micron. Also described are methods for forming the magnetic laminating structure.
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