Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 11, 2019
Patent Application Number
15805753
Date Filed
November 7, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
Processing methods comprising selectively replacing a first pillar material with a second pillar material in a self-aligned process are described. The first pillar material may be grown orthogonally to the substrate surface and replaced with a second pillar material to leave a substantially similar shape and alignment as the first pillar material.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
