Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 18, 2019
Patent Application Number
15997172
Date Filed
June 4, 2018
Patent Primary Examiner
Patent abstract
A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. The flow-through control plate is especially useful in fast acting proportional control applications such as gas delivery in semiconductor manufacturing.
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