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US Patent 10326002 Self-aligned gate contact and cross-coupling contact formation
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Patent
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Date Filed
June 11, 2018
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Date of Patent
June 18, 2019
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Patent Application Number
16004935
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Patent Citations Received
US Patent 12094942 Butted contacts and methods of fabricating the same in semiconductor devices
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US Patent 11594602 Butted contacts and methods of fabricating the same in semiconductor devices
US Patent 11349001 Replacement gate cross-couple for static random-access memory scaling
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US Patent 11784125 Wrap around cross-couple contact structure with enhanced gate contact size
Patent Inventor Names
Scott Beasor
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Hui Zang
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Ruilong Xie
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Zhenyu Hu
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10326002
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Patent Primary Examiner
Matthew L Reames
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