Patent attributes
A temperature and humidity sensor includes a substrate, a first electrode provided on the substrate, a linear second electrode at least part of which is so provided as to extend along the first electrode, and a moisture sensitive film provided between the part of the second electrode extending along the first electrode and the first electrode. The second electrode has a section that is formed in a spiral shape when viewed from above so as to form an inductor. With this, a precise oscillation circuit can be configured so that a temperature-humidity sensor small in size and capable of being easily manufactured can be provided.