Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 30, 2019
Patent Application Number
15673147
Date Filed
August 9, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for fabricating calcite channels in a nanofluidic device is described. A photoresist is coated on a substrate, and a portion of the photoresist is then exposed to a beam of electrons in a channel pattern. The exposed portion of the photoresist is developed to form a channel pattern, and calcite is deposited in the channel pattern using a calcite precursor gas. The deposited calcite includes at least one side having a length in a range of approximately 50 to 100 nanometers. The photoresist remaining after developing the exposed portion of the photoresist is removed.
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