Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Eugene J. O'Sullivan0
Bruce B. Doris0
Hariklia Deligianni0
Naigang Wang0
Date of Patent
August 6, 2019
0Patent Application Number
154032920
Date Filed
January 11, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A magnetic laminating inductor structure and process for preventing substrate bowing and damping losses generally include a laminated film stack including a magnetic layer having a tensile stress, an insulating layer having a compressive stress disposed on the magnetic layer, and a dielectric planarizing layer on the insulating layer. The dielectric planarizing layer has a neutral stress and a roughness value less than the insulating layer. The reduction in surface roughness reduces damping losses and the compressive stress of the insulating layers reduces wafer bowing.
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