US Patent 10381252 Tool auto-teach method and apparatus
Patent 10381252 was granted and assigned to Brooks Automation on August, 2019 by the United States Patent and Trademark Office.
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A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
US Patent 10381252 Tool auto-teach method and apparatus
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