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US Patent 10394131 Image log slope (ILS) optimization

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
February 9, 2016
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Date of Patent
August 27, 2019
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Patent Application Number
15547324
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Patent Citations Received
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US Patent 11354484 Failure model for predicting failure due to resist layer
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US Patent 11768442 Method of determining control parameters of a device manufacturing process
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US Patent 11513442 Method of determining control parameters of a device manufacturing process
Patent Inventor Names
Duan-Fu Stephen Hsu
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10394131
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Patent Primary Examiner
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Colin W Kreutzer
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