US Patent 10395358 High sensitivity repeater defect detection
Patent 10395358 was granted and assigned to KLA-Tencor on August, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 6, 2017
0
Date of Patent
August 27, 2019
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Patent Applicant
Patent Application Number
15804980
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Patent Citations Received
Patent Inventor Names
Santosh Bhattacharyya
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Ashok Mathew
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Benjamin Murray
0
Bjorn Brauer
0
Chetana Bhaskar
0
Eugene Shifrin
0
Hucheng Lee
0
Lisheng Gao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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