US Patent 10395963 Electrostatic chuck
Patent 10395963 was granted and assigned to Entegris on August, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 17, 2016
0
Date of Patent
August 27, 2019
0
Patent Applicant
Patent Application Number
15294950
0
Patent Citations Received
Patent Inventor Names
Richard A. Cooke
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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