US Patent 10395984 Self-aligned via interconnect structures
Is a
Date Filed
March 15, 2016
Date of Patent
August 27, 2019
Patent Application Number
15070242
Patent Citations Received
Patent Inventor Names
Brian A. Cohen
0
Benjamin C. Backes
0
Carl J. Radens
0
Joyeeta Nag
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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