US Patent 10409171 Overlay control with non-zero offset prediction
Patent 10409171 was granted and assigned to KLA-Tencor on September, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 10, 2018
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Date of Patent
September 10, 2019
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Patent Applicant
Patent Application Number
15867485
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Patent Citations Received
Patent Inventor Names
Amnon Manassen
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Michael E. Adel
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Pradeep Subrahmanyan
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William Pierson
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Ady Levy
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DongSub Choi
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Dror Alumot
0
Hoyoung Heo
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John Charles Robinson
0
Liran Yerushalmi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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