US Patent 10410894 Purge stocker and purging method
Patent 10410894 was granted and assigned to Murata Machinery on September, 2019 by the United States Patent and Trademark Office.
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A purge stocker includes a first supply unit including N first purge apparatuses, each having a first supply unit configured to support a storage container, a first supply pipe configured to supply the purge gas into the storage container supported by the first supporting unit, and a first flow rate adjusting unit configured to adjust the flow rate of the purge gas in the first supply pipe; and a second supply unit including M second purge apparatuses, each having a second supporting unit configured to support the storage container and a second supply pipe configured to supply the purge gas into the storage container supported by the second supporting unit. When the storage containers are supported by a certain number of second supporting units, the second supply unit supplies the storage containers with the purge gas through the respective second supply pipes.
US Patent 10410894 Purge stocker and purging method
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