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US Patent 10416380 Suspended photonic waveguides with top side sealing

Patent 10416380 was granted and assigned to Acacia Communications on September, 2019 by the United States Patent and Trademark Office.

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Patent abstract

Techniques for forming a photonic device that includes a suspended photonic structure suspended over a silicon substrate are described. A sealed cavity is positioned between the silicon substrate and the photonic structure, and one or more regions of dielectric material act to seal the cavity. Additional structure(s) may be formed on top of the dielectric material.

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Patent Citations Received
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US Patent 11803009 Photonics structures having a locally-thickened dielectric layer
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=1041638000
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Patent Citations Received
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US Patent 11543687 Optoelectronic device
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Patent Citations Received
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US Patent 11467434 Thermal isolation element
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US Patent 11556020 Integrated wavelength selector
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US Patent 11552710 Resistivity engineered substrate for RF common-mode suppression
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US Patent 11543687 Optoelectronic device
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US Patent 11543606 Photonics chips with an edge coupler and a continuous crackstop
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US Patent 11467434 Thermal isolation element
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Acacia Communications
Acacia Communications
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Current Assignee
Acacia Communications
Acacia Communications
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
104163800
Date of Patent
September 17, 2019
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Patent Application Number
156317810
Date Filed
June 23, 2017
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=104163800
Patent Citations Received
‌
US Patent 10627655 Monolithic electro-optical modulator having suspended structure
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Patent Primary Examiner
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Michael Stahl
0
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10416380
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Patent citations received
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US Patent 10627655 Monolithic electro-optical modulator having suspended structure
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 US Patent 10416380 Suspended photonic waveguides with top side sealing

Infobox
Is a
Patent
Patent
Patent applicant
Acacia Communications
Acacia Communications
Current assignee
Acacia Communications
Acacia Communications
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10416380
Date of patent
September 17, 2019
Patent application number
15631781
Date Filed
June 23, 2017
Patent primary examiner
‌
Michael Stahl

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