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US Patent 10424498 Substrate transport vacuum platform

Patent 10424498 was granted and assigned to Persimmon Technologies Corporation on September, 2019 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12090645 Robot for high-temperature applications
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US Patent 12083666 Traversing robot with multiple end effectors
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Patent abstract

A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.

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Patent Citations Received
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US Patent 11769680 Substrate transport vacuum platform
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edited on 22 Jul, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=1042449800
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Persimmon Technologies Corporation
Persimmon Technologies Corporation
0
Current Assignee
Persimmon Technologies Corporation
Persimmon Technologies Corporation
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
104244980
Date of Patent
September 24, 2019
0
Patent Application Number
144808030
Date Filed
September 9, 2014
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=104244980
Patent Citations Received
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US Patent 11031269 Substrate transport robot, substrate transport system, and substrate transport method
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US Patent 11427415 Automatic loading and unloading device
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Patent Primary Examiner
‌
Basil S Katcheves
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edited on 30 Mar, 2023
Edits on 26 Sep, 2022
"Entity importer update"
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edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Persimmon Technologies Corporation
Persimmon Technologies Corporation
0
Current Assignee
Persimmon Technologies Corporation
Persimmon Technologies Corporation
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
104244980
Date of Patent
September 24, 2019
0
Patent Application Number
144808030
Date Filed
September 9, 2014
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=104244980
Patent Citations Received
‌
US Patent 11031269 Substrate transport robot, substrate transport system, and substrate transport method
0
‌
US Patent 11427415 Automatic loading and unloading device
0
Patent Primary Examiner
‌
Basil S Katcheves
0
Edits on 23 Sep, 2022
"update citations for inverse infoboxes"
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edited on 23 Sep, 2022
Edits on 31 Aug, 2022
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edited on 31 Aug, 2022
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Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11427415 Automatic loading and unloading device
Edits on 18 Jun, 2022
"Entity importer update"
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edited on 18 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10424498
Edits on 12 Feb, 2022
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Golden AI
edited on 12 Feb, 2022
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Infobox (+1 properties)
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Patent citations received
‌
US Patent 11031269 Substrate transport robot, substrate transport system, and substrate transport method
Edits on 29 Jan, 2022
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created this topic on 29 Jan, 2022
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 US Patent 10424498 Substrate transport vacuum platform

Infobox
Is a
Patent
Patent
Patent applicant
Persimmon Technologies Corporation
Persimmon Technologies Corporation
Current assignee
Persimmon Technologies Corporation
Persimmon Technologies Corporation
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10424498
Date of patent
September 24, 2019
Patent application number
14480803
Date Filed
September 9, 2014
Patent primary examiner
‌
Basil S Katcheves

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